Change Laws of Flake's Temperature during Making a Diamond Film by DC-PJ

摘要

When making a diamond film by direct current plasma jet, a kind piece of flake is used as a based body which the film can be attached to. The flake's temperature is unstable. Therefore, some experiments and constructed mathematical models, which were solved by computer, were done. The results show that the flake's temperature is influenced by many factors and the mains are plasma jet power and vacuum pressure. Through adjusting the two parameters, the flake's temperature can be accurately controlled, furthermore , diamond films' quality would be improved. Lowering sediment platform's temperature has a little effect to the flake's temperature at present technology conditions.