A novel MEMS based linear actuator for mirror shape correction applications

摘要

In this paper, we propose a MEMS based electro-thermal actuator which can achieve minimum step sizes less than 100 nm. Configuration of the proposed actuator consists of slider, substrate and gripper. In the structure of the slider, two chevrons are used which lead to 1-D motion of the slider. Structure of the gripper comprises of clutch and the chevrons. The gripper is used to stabilized the slider via connecting the slider to the substrate. The chevrons of the gripper are used to pull and to release the clutch of the gripper. By applying a DC voltage of 0.5 V to the chevrons of the slider, a force of 8 mN and a stroke of 2.2 μm are produced by the slider. That is necessary to say that normally latched or zero-power latching scheme is an important property of the presented actuator.