MEASUREMENT OF SURFACE ROUGHNESS OF ALUMINUM GROUND SAMPLES USING WHITE LIGHT INTERFERENCE MICROSCOPE

摘要

The while light interference microscope is used to study three aluminum samples of different roughness degrees. The optical technique, which combines vertical scanning with phase-shift measurements, provides direct, fast, accurate and reproducible 3-dimensional surface profile measurements. Samples data are discussed and a theoretical simulation of stylus measurements is performed to be correlated to the interfe.ro-metrical results.