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首页> 外文期刊>Journal of microanolithography, MEMS, and MOEMS >Post place and route design-technology co-optimization for scaling at single-digit nodes with constant ground rules
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Post place and route design-technology co-optimization for scaling at single-digit nodes with constant ground rules

机译:后期布局和路线设计技术共同优化,以恒定的基本规则在单个数字节点上进行缩放

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摘要

Standard-cell design, technology choices, and place and route (P&R) efficiency are deeply interrelated in CMOS technology nodes below 10 nm, where lower number of tracks cells and higher pin densities pose increasingly challenging problems to the router in terms of congestion and pin accessibility. To evaluate and downselect the best solutions, a holistic design-technology co-optimization approach leveraging state-of-the-art P&R tools is thus necessary. We adopt such an approach using the imec N7 technology platform, with contacted poly pitch of 42 nm and tightest metal pitch of 32 nm, by comparing post P&R area of an IP block for different standard cell configurations, technology options, and cell height. Keeping the technology node and the set of ground rules unchanged, we demonstrate that a careful combination of these solutions can enable area gains of up to 50%, comparable with the area benefits of migrating to another node. We further demonstrate that these area benefits can be achieved at isoperformance with >20% reduced power. As at the end of the CMOS roadmap, conventional scaling enacted through pitch reduction is made more and more challenging by constraints imposed by lithography limits, material resistivity, manufacturability, and ultimately wafer cost, the approach shown herein offers a valid, attractive, and low-cost alternative.
机译:在10 nm以下的CMOS技术节点中,标准单元设计,技术选择以及布局和布线(P&R)效率密切相关,在这些技术节点中,较少的跟踪单元和较高的引脚密度给路由器带来了越来越多的挑战,包括拥塞和引脚问题辅助功能。为了评估和选择最佳解决方案,因此有必要利用最先进的P&R工具进行整体设计-技术协同优化。我们通过比较不同标准单元配置,技术选择和单元高度的IP模块的P&R面积,采用imec N7技术平台采用的这种方法,其接触式多晶硅节距为42 nm,最紧密金属节距为32 nm。在保持技术节点和基本规则不变的情况下,我们证明了这些解决方案的仔细组合可以使面积增加高达50%,这与迁移到另一个节点的区域效益相当。我们进一步证明,这些同等性能可以在功耗降低20%以上的情况下实现。截至CMOS路线图的末尾,由于光刻限制,材料电阻率,可制造性以及最终的晶圆成本所施加的限制,通过节距减小实现的传统缩放越来越具有挑战性,本文所示的方法提供了一种有效,有吸引力且低廉的方法成本替代。

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