Palladium and palladium alloy composite membranes prepared by metal-organic chemical vapor deposition method (cold-wall)

摘要

This Pd and Pd-Ni alloy membranes were prepared by the MOCVD method using an cold-wall technique. Pd(C_3H_5)(C_5H_5) and Ni(C_3H_5)(C_5H_5) were decomposed into densely aggregated metal crystalites that were to plug mesoporous nickel-stainless steel (Ni-SUS) or γ-Al_2O_3/α-Al_2O_3 supports. The use of highly volatile organometrallic precursors enabled continuous and controlled deposition mode, which resulted in reproducible formation of thin impervious Pd-Ni alloy membranes.