Performance of COD removal from oxide chemical mechanical polishing wastewater using iron electrocoagulation

摘要

This study investigated the feasibility of chemical oxygen demand (COD) abatement from oxide chemical mechanical polishing (oxide-CMP) wastewater. The process variables, including applied voltage, electrolyte concentration and temperature, were evaluated in terms of COD removal efficiency. In addition, the effects of applied voltage, supporting electrolyte, and temperature on electric energy consumption were evaluated. Under the optimum balance of variables, satisfactory COD removal efficiency and relatively low energy consumption were achieved. The optimum electrolyte concentration, applied voltage, and temperature were found to be 200 mg/L NaCl, 20 V, and 25℃, respectively. Under these conditions, the COD concentration in oxide-CMP wastewater decreased by more than 90%, resulting a final wastewater COD concentration that was below the Taiwan discharge standard (100 mg/L). Since the processed wastewater quality exceeded the direct discharge standard, the effluent could be considered for reuse. COD removal rates obtained during the electrocoagulation process can be described using a pseudo-kinetic model. The present study results show that the kinetic data fit the pseudo first-order kinetic model well. Finally, the morphology and composition of the sludge produced were characterized using scanning electron microscopy (SEM) and energy dispersion spectra (EDS).