Patent Issued for Method and Apparatus for Performing Model-Based OPC for Pattern Decomposed Features

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Patent Issued for Method and Apparatus for Performing Model-Based OPC for Pattern Decomposed Features

机译：为模式分解特征执行基于模型的OPC的方法和装置颁发的专利

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2013 MAR 20 (VerticalNews) -- By a News Reporter-Staff News Editor at Journal of Engineering -- Anpatent by the inventors Hsu, Duan-Fu Stephen (Fremont, CA); Park, Jung Chul (Pleasanton, CA); VannDen Broeke, Douglas (Sunnyvale, CA); Chen, Jang Fung (Cupertino, CA), filed on January 25, 2012,nwas cleared and issued on March 5, 2013, according to news reporting originating from Alexandria,nVirginia, by VerticalNews correspondents.

机译：2013年3月20日（VerticalNews）-由《工程学杂志》的新闻记者-工作人员新闻编辑-发明人Hsu，Duan-Fu Stephen的专利（加利福尼亚州弗里蒙特） Park，Jung Chul（加利福尼亚州普莱森顿）;道格拉斯的VannDen Broeke（加利福尼亚州桑尼维尔）；根据VerticalNews通讯员来自弗吉尼亚州亚历山大港的新闻报道，2012年1月25日提交的Chen Jang Fung（加利福尼亚州库珀蒂诺）已被清理并于2013年3月5日发布。

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《Journal of Engineering》 |2013年第12期|1-4|共4页
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ASML Masktools B.V.;

机译：ASTL Masktools V.V.;

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Patent Issued for Method and Apparatus for Performing Model-Based OPC for Pattern Decomposed Features

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