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首页> 外文期刊>Journal of Crystal Growth >3D coupled electromagnetic and thermal modelling of EFG silicon tube growth
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3D coupled electromagnetic and thermal modelling of EFG silicon tube growth

机译:EFG硅管生长的3D耦合电磁和热建模

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摘要

The edge-defined film-fed growth (EFG) process is mainly used to grow silicon ribbons and hollow cylinders as well as hollow polygons of various geometries. The development of the EFG process is primarily focused on technology improvements and cost reduction of wafers for photovoltaic applications. In case of the growth of hollow polygons, three-dimensional (3D) numerical analysis is extensively used because the system of polygonal geometry cannot be adequately described in axisymmetric model. Electromagnetic simulation predicts a 3D distribution of electromagnetic energy in all the system. The calculated three-dimensional temperature fields allow the analysis of the temperature profiles along and across the growing silicon tubes and the investigation of thermally induced stress and strain in different cases. The non-linear model consisting on electromagnetic, thermal and structural simulations has been adjusted and successfully validated by experimental tests with industrial installations.
机译:边缘限定的薄膜进料生长(EFG)工艺主要用于生长硅带和空心圆柱体以及各种几何形状的空心多边形。 EFG工艺的发展主要集中在光伏应用晶片的技术改进和成本降低上。对于中空多边形的增长,由于无法在轴对称模型中充分描述多边形几何系统,因此广泛使用了三维(3D)数值分析。电磁仿真可预测整个系统中电磁能量的3D分布。计算出的三维温度场可以分析沿生长硅管的温度分布,并研究不同情况下的热应力和应变。由电磁,热和结构模拟组成的非线性模型已经过调整,并已通过工业装置的实验测试成功验证。

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