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首页> 外文期刊>Journal of Crystal Growth >Design of ceramic springs for use in semiconductor crystal growth in microgravity
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Design of ceramic springs for use in semiconductor crystal growth in microgravity

机译:用于微重力下半导体晶体生长的陶瓷弹簧的设计

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摘要

Segregation studies can be done in microgravity to reduce buoyancy-driven convection and investigate diffusion-controlled growth during the growth of semiconductor crystals. During these experiments, it is necessary to prevent free surface formation in order to avoid surface tension driven convection (Marangoni convection). Semiconductor materials such as gallium arsenide and germanium shrink upon melting, so a spring is necessary to reduce the volume of the growth chamber and prevent the formation of a free surface when the sample melts. A spring used in this application must be able to withstand both the high temperature and the processing atmosphere. During the growth of gallium arsenide crystals during the GTE Labs/USAF/NASA GaAs GAS Program and during the CWRU GaAs programs aboard the First and Second United States Microgravity Laboratories, springs made of pyrolytic boron nitride (PBN) leaves were used. The mechanical properties of these PBN springs have been investigated and springs having spring constants ranging from 0.25 to 25 N/mm were measured. With this improved understanding comes the ability to design springs for more general applications, and guidelines are given for optimizing the design of PBN springs for crystal growth applications.
机译:可以在微重力下进行偏析研究,以减少浮力驱动的对流并研究半导体晶体生长过程中扩散控制的生长。在这些实验中,有必要防止自由表面的形成,以避免表面张力驱动的对流(Marangoni对流)。半导体材料(例如砷化镓和锗)在熔化时会收缩,因此必须使用弹簧来减小生长室的体积并防止样品熔化时形成自由表面。在此应用中使用的弹簧必须能够承受高温和加工气氛。在美国第一和第二美国微重力实验室的GTE Labs / USAF / NASA GaAs GAS计划期间以及在CWRU GaAs计划期间的砷化镓晶体生长过程中,使用了由热解氮化硼(PBN)制成的弹簧。已经研究了这些PBN弹簧的机械性能,并测量了弹簧常数为0.25至25 N / mm的弹簧。有了这种更好的理解,就可以设计出更通用的弹簧,并给出了优化晶体生长应用的PBN弹簧设计的指南。

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