Miniaturization of Spherically Contoured Rectangular AT-cut Quartz-Crystal Resonators by using Reactive Ion Etching

摘要

This paper describes resonant characteristics of spherically contoured AT-cut quartz-crystal resonators, and a novel fabrication process. The fabrication process is based on a photolithographic process suitable for the mass production. Further, the time required to finish quartz blanks into the spherically contoured shape is dramatically less than for conventional methods. Our measurements show that Q of the spherically contoured resonators fabricated with our method are an order of magnitude higher than those resonators without the spherical shape.