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机译:利用扭转至横向振动转换的微机电系统谐振器
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan,Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan,Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan,Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan,Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan,Electronic Device Company, Sanyo Electric Co., Ltd., Daito, Osaka 574-8534, Japan;
Research Organization of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan;
College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan;
机译:利用扭转至横向振动转换的高质量因数80 MHz微机电系统谐振器
机译:利用鱼骨形微机电系统谐振器的高阶振动模式频率调谐
机译:利用窄间隙工艺评估单晶硅微机电系统谐振器
机译:利用微机电系统(MEMS)的混沌激励进行微结构故障检测
机译:利用高介电常数铁电薄膜的高功率射频微机电系统(RF-MEMS)
机译:利用二维微机电系统扫描仪的微型近红外双轴共聚焦显微镜
机译:通过在毫米尺寸的微机电系统静电振动能量收割机中使用嵌套倒装芯片组件,采用间隙变窄发电增强