Thermal properties of lateral-current-injection semiconductor membrane Fabry-Perot laser under continuous-wave operation

摘要

For the realization of on-chip optical interconnects, light sources enabling ultralow power consumption and high-efficiency operation are required. With this aim, we fabricated lateral-current-injection-type membrane Fabry-Perot lasers with a threshold current of 3.5 mA and an external differential quantum efficiency of 11% under a room temperature-continuous wave (RT-CW) condition. To the best of our knowledge, we experimentally evaluated the thermal properties of a membrane laser for the first time. From the measurement, we obtained a thermal resistance of 330 K/W, which well agreed with the theoretical value of 340 K/W. From the theoretical analysis, it was found that a reduction of the benzocyclobutene thickness was effective for reducing the thermal resistance of the membrane laser. Finally, we determined that the increase in thermal resistance for short cavity (less than 50 mu m) devices is not a problem because self-heating is small for low operation current. (c) 2015 The Japan Society of Applied Physics