Removal of Fe_3O_4 Film Using Atmospheric Transferred Plasma at Low Temperature

摘要

Ar transferred thermal plasma was applied onto Fe_3O_4 film covering an Fe rod using a hybrid plasma furnace composed of both non-transferred and transferred thermal plasma. A tungsten rod was used as an electrode. The flame from the transferred plasma spread over the surface of the Fe_3O_4 film. The transferred plasma direct current was set to each of the values (0, 2, 3, 4, and 5 A) after the non-transferred plasma made contact with the Fe_3O_4 film. The removal mass of the Fe_3O_4 film directly increased as the transferred plasma current increased. The oxygen potential of the output gas decreased when the plasma was irradiated. The temperature on the surface was 1 073 (K) during the 5 A plasma irradiation (this temperature is under the melting point), even though a trace of melted Fe_3O_4 was observed after the plasma treatment.