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Experimental study on the characteristics of near-field distribution of chips based on nano-diamond quantum magnetometer

机译:基于纳米金刚石量子磁力计的芯片近场分布特性的试验研究

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摘要

Microwave field near-field radiation imaging technology is widely used in the failure analysis of chips, but due to the low resolution, it is hard to obtain the field distributions of miniaturized and precision devices. In this article, we built two testing systems based on the method of electromagnetic induction and diamond color-center, respectively. The traditional system uses a multilayer PCB microstrip, while the novel system uses nanoscale high-sensitivity sensing of color centers in the design of resonant microwave field probes with near-field measurement sensitivity to enable nanoscale high-sensitivity measurements of different physical quantities. We tested two devices in this article, and the results show that compared with traditional measurement method, the novel method promotes higher resolution (submicron level), higher sensitivity, and nondestructive imaging. This method can accurately characterize the near-field distribution of microwave integrated circuit chips, such as spiral antennas, and amplifiers. Especially in the amplifier chip, the signal change trend of the amplifier circuit can be clearly characterized. It is expected to provide a new measurement concept in real word applications, such as chip electromagnetic compatibility, microwave chip failure analysis, and antenna near-field scanning radiation emission testing.
机译:微波场近场辐射成像技术广泛应用于芯片的故障分析,但由于较低的分辨率,很难获得小型化和精密装置的场分布。在本文中,我们分别基于电磁感应和钻石彩色中心的方法建立了两个测试系统。传统系统采用多层PCB微带,而新颖的系统使用纳米级高灵敏度感测的谐振微波场探头,具有近场测量敏感性,使纳米级高灵敏度测量不同的物理量。我们在本文中测试了两个设备,结果表明,与传统的测量方法相比,新方法促进了更高的分辨率(亚微米),更高的灵敏度和无损成像。该方法可以精确地表征微波集成电路芯片的近场分布,例如螺旋天线和放大器。特别是在放大器芯片中,可以清楚地表征放大器电路的信号变化趋势。预计将在真正的Word应用中提供一种新的测量概念,例如芯片电磁兼容性,微波芯片故障分析和天线近场扫描辐射发射测试。

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