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首页> 外文期刊>Journal of Microelectronics and Electronic Packaging >The Way to High Volume Fabrication of Lab-on-a-Chip Devices-A Technological Approach for Polymer Based Microfluidic Systems with Integrated Active Valves and Pumps
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The Way to High Volume Fabrication of Lab-on-a-Chip Devices-A Technological Approach for Polymer Based Microfluidic Systems with Integrated Active Valves and Pumps

机译:大规模制造芯片实验室设备的方法-一种集成主动阀和泵的基于聚合物的微流体系统的技术方法

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摘要

We present a technology platform suitable for the mass production of laboratory-on-a-chip devices made of polymers with integrated active and passive components. The presented microfluidic platform with integrated valves and pumps for active flow management is realized with three layers consisting of two polymer parts separated by a thin elastic TPE (thermoplastic elastomer) membrane welded together in one step. The elastic TFE membrane acts as an integrated deflectable membrane layer between the two outer polymer layers, each made of a weldable thermoplastic polymer (polycarbonate). Valving is realized by applying pressure in a displacement chamber above a hydraulic channel causing the membrane to deform and to seal the channel. A pump is fabricated using a displacement chamber with a valve on the inlet and outlet. The presented components, namely valve and pump, show excellent behavior regarding response time, sealing quality, and pump rate needing only a low actuation pressure. The three-layer-stack is joined in a single process step by using laser welding, creating devices with high mechanical stability. This production technology fulfills the requirements of a high volume fabrication at high quality and has the potential to manufacture cost-efficient and reliable laboratory-on-a-chip systems. The used materials show a high chemical resistance against a broad range of commonly used liquids and good optical characteristics for the use in (xTAS. This consistent technological approach represents a flexible platform for microfluidics with active components to be used in complex applications.
机译:我们提供了一个技术平台,适合大规模生产由集成了有源和无源组件的聚合物制成的芯片实验室设备。所展示的微流体平台具有用于主动流动管理的集成阀和泵,是由三层组成的,该三层由两个聚合物部分组成,这些聚合物部分由一层薄薄的弹性TPE(热塑性弹性体)膜隔开,并一步焊接在一起。弹性TFE膜充当两个外部聚合物层之间的一体式可偏转膜层,每个外部聚合物层均由可焊接的热塑性聚合物(聚碳酸酯)制成。通过在液压通道上方的位移室中施加压力,使膜变形并密封通道,从而实现阀控。泵是使用排量室制造的,该排量室的入口和出口均带有阀。所展示的组件,即阀和泵,在响应时间,密封质量和泵速方面表现出优异的性能,仅需较低的致动压力。通过激光焊接在一个工艺步骤中将三层堆叠连接在一起,从而创建具有高机械稳定性的设备。这项生产技术可以满足高质量,高批量生产的要求,并且具有制造经济高效且可靠的片上实验室系统的潜力。使用的材料对(xTAS)广泛使用,对多种常用液体表现出很高的耐化学性,并且具有良好的光学特性。这种一致的技术方法代表了灵活的微流体平台,该平台具有用于复杂应用的活性成分。

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    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

    Laboratory for Process Technology, Department of Microsystems Engi-neering (IMTEK), University of Freiburg, 79110 Freiburg, Germany;

    Laboratory for Process Technology, Department of Microsystems Engi-neering (IMTEK), University of Freiburg, 79110 Freiburg, Germany;

    Laboratory for MEMS Applications, Department of Microsystems Engi-neering (IMTEK), University of Freiburg, 79110 Freiburg, Germany;

    Robert Bosch GmbH, Corporate Sector Research and Advance Engineer-ing, Microsystem Technologies, 70839 Gerlingen, Germany;

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  • 正文语种 eng
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  • 关键词

    active microvalve; microfabrication; thermoplastic elastomer; lab-on-a-chip;

    机译:主动微型阀微细加工;热塑性弹性体;芯片实验室;

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