MOEMS-based accelerometer sensor using photonic crystal for vibration monitoring in an automotive system

摘要

Diagnosing the vibration in automobiles is a priority since it provides comfort to the passenger inside vehicle. This paper presents MOEMS accelerometer sensor by using photonic crystal. A spring mass system with photonic crystal technology is visualised and scrutinised. An optical sensing system with photonic crystal technology was studied and simulated with rods in air and holes in slab configuration. The applied force deflection of rectangular defect slab for vertical and horizontal movement is verified. Gaussian pulse propagated through the defect region in a photonic crystal slab resulted in wavelength shift for each defection of slab. Transmission spectrum was obtained for each deflection direction of slab and configurations. Q factor analysed for each displacement of slab found to be 3,210 for HIS vertical movement. It is found that distinct change in wavelength obtained for holes in slab configuration during vertical and horizontal movement of a slab compared to the results of rods in air configuration. High quality factor and sensitivity improvement obtained in this work showed feasibility of future fabrication for HIS and RIA configuration-based MOEMS sensor for vibration monitoring system.