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首页> 外文期刊>The International Journal of Advanced Manufacturing Technology >Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool
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Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool

机译:开发用于三轴小型机床的综合几何误差的光学测量系统

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摘要

Miniaturized machine tool (mMT) is one kind of downsized machine tool derived from conventional machines to manufacture miniature parts. However, it is extremely difficult to calibrate an mMT due to its small dimension. This paper presents a novel method that uses laser diode and optics to measure integrated geometric errors (three translation errors and three rotational errors). The squareness error between two axes is calculated by the least-square method. These seven errors are acquired simultaneously in one setup for each motion direction. The proposed measuring system consists of laser diodes, beam splitters, and 2D position sensing detectors (PSDs). The relationship between the PSD readings and the geometric errors calculated by the algorithm based on homogeneous transformation matrix is derived according to the configuration of measured mMT. Simulation is carried out to prove the validity of this algorithm. Sensitivity analysis based on the mounting errors of system components is also presented in this paper. Finally, an experiment is executed to verify the feasibility of the proposed measuring method.
机译:小型机床(mMT)是一种从传统机床派生而来制造微型零件的小型机床。但是,由于mMT尺寸较小,因此很难校准。本文提出了一种使用激光二极管和光学器件测量积分几何误差(三个平移误差和三个旋转误差)的新颖方法。通过最小二乘法计算两个轴之间的垂直度误差。对于每个运动方向,在一个设置中同时获取这七个误差。拟议的测量系统由激光二极管,分束器和2D位置感应检测器(PSD)组成。根据测得的mMT的配置,推导了PSD读数与算法基于均匀变换矩阵计算出的几何误差之间的关系。通过仿真证明了该算法的有效性。本文还基于系统组件的安装误差进行了灵敏度分析。最后,通过实验验证了该方法的可行性。

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