Evaluation of micromechanical manufacturing processes for microfluidic devices

摘要

In this paper, several micromechanical manufacturing technologies were studied in order to characterize their performance for prototyping miniaturized geometries known as microchannels, which are the main geometric features of microfluidic devices. The technologies used were microend milling, wire electrodischarge machining/sandblasting, and abrasive water jet. Their capabilities were compared with lithography capabilities, which is the conventional process for microchannel manufacturing. The evaluation consists in a comprehensive study of surface quality and topography, made with the help of advanced contact and noncontact profilometers over each prototype. Also economical considerations have been taken into account in order to choose the most appropriate manufacturing process for the prototyping of microfluidic devices. The results show that microend milling process can compete with lithography, in terms of achieving acceptable levels of product quality and economics.