Computational and experimental study of nanosecond laser ablation of crystalline silicon

摘要

In this paper, a numerical model of nanosecond laser ablation of crystalline silicon has been established. Based on the highly nonlinear model of heat transfer and phase change in crystalline silicon after absorbing laser light, heat transfer equation is solved by using finite element method implemented in ANSYS. The simulation of ablation depth of crystalline silicon is obtained under different conditions of laser fluence and pulse overlap. Comparing with the ablation morphology obtained from SEM observations, the computational results and experimental data show good agreement