LiTaO_3 and LiNbO_3 Epitaxial Films

摘要

The preparation of film-forming peroxide solutions of LiTaO_3 and LiNbO_3 precursors is described. The solutions are used to produce LiTaO_3 films on single-crystal corundum and LiNbO_3 substrates by the spinning process and dip coating, followed by heat treatment, and LiNbO_3 films on single-crystal corundum substrates by the spinning process.