ボールねじ駆動テーブルシステムの機械特性変動に対する位置決め精度の解析と性能向上

摘要

The paper presents analysis and improvement of the control accuracy for a positioning device with a ball screw-driven table system. In the analytical studies, effects of variations of mechanical parameters on the positioning accuracy are examined, where a precise simulator with static and dynamic friction models are provided to simulate actual responses in the positioning. The analyses clarify that the mechanical variations behave as equivalent disturbances with components in low frequency range and deteriorate the positioning accuracy. A robust disturbance observer, therefore, is designed in the frame work of 2-degrees-of-freedom positioning controller, in order to improve the disturbance suppression characteristics. The effectiveness of the proposed design has been verified by experiments with a ball screw-driven table system on machine stand.%高速·高精度位置決め制御は各種メカトロニクスシステrnムに必須な要素技術の一つであり，その制御特性評価とrn性能向上は，より付加価値の高いシステム創成に当たってrn重要な課題である。本論文は，ボールねじ駆動テーブル位rn置決め機構を対象に，その機械特性変動に対する位置決めrn精度への影響評価と，その定量評価に基づく外乱オブザーバrnの設計によって，位置決めの高精度化を目指すものである。