Megasonic Cleaning of Blanket and Patterned Samples in Carbonated Ammonia Solutions for Enhanced Particle Removal and Reduced Feature Damage

摘要

An investigation of particle removal efficiency and feature damage has been conducted in ${rm NH}_{4}{rm OH/NH}_{4}{rm HCO}_{3}$ cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2 – 8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from ${rm NH}_{4}{rm OH}$ and ${rm NH}_{4}{rm OH/NH}_{4}{rm HCO}_{3}$ solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous ${rm CO}_{2}$.