A 2-MHz 6-kVA voltage-source inverter using low-profile MOSFET modules for low-temperature plasma generators

摘要

This paper presents a 2 MHz 6 kVA voltage-source inverter for low-temperature plasma generators. A new MOSFET module referred to as a "mega pack" is specially designed and fabricated for high-frequency high-power applications. It has a low-profile package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to-back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz.