Thermomechanical Assessment of Die-Attach Materials for Wide Bandgap Semiconductor Devices and Harsh Environment Applications

摘要

Currently, the demand by new application scenarios of increasing operating device temperatures in power systems is requiring new die-attach materials with higher melting points and suitable thermomechanical properties. This makes the die-attach material selection, die-attaching process, and thermomechanical evaluation a real challenge in nowadays power packaging technology. This paper presents a comparative analysis of the thermomechanical performance of high-temperature die-attach materials (sintered nano-Ag, AuGe, and PbSnAg) under harsh thermal cycling tests. This study is carried out using a test vehicle formed by four dice (considering Si and SiC semiconductors) and Cu substrates. Thermally cycled test vehicles have been thermomechanically evaluated using die-shear tests and acoustic microscopy inspections. Besides, special attention is paid to set up a nano-Ag sintering process, in which the effects of sintering pressure or substrate surface state (roughness and surface activation) on the die-attach layer are analyzed. As a main result, this study shows that the best die-attach adherence is obtained for nano-Ag when pressure is applied on the dice (using a specifically designed press) during the sintering process (11 MPa provided die-shear forces of 53 kgf). However, this die-attach presents a faster thermomechanical degradation under harsh thermal cycling tests than other considered high-temperature die-attach materials (AuGe and PbSnAg) and PbSnAg shows the best thermomechanical performances.