Micromechanical optical switching with voltage control using SOI movable integrated optical waveguides

摘要

Optical switching is demonstrated using movable integrated optical waveguides fabricated on silicon-on-insulator substrates. The switching effect is produced by the voltage-controlled micromechanical deflection of the movable waveguides. The dynamic response of the deflection is studied. A contrast ratio of 12 dB of switching is obtained using an applied voltage of less than 10 V. At 20 V, the contrast ratio is about 40 dB.