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Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging

机译:硅光子电路:CMOS集成,光纤耦合和封装

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摘要

Silicon photonics is a new technology that should at least enable electronics and optics to be integrated on the same optoelectronic circuit chip, leading to the production of low-cost devices on silicon wafers by using standard processes from the microelectronics industry. In order to achieve real-low-cost devices, some challenges need to be taken up concerning the integration technological process of optics with electronics and the packaging of the chip. In this paper, we review recent progress in the packaging of silicon photonic circuits from on-CMOS wafer-level integration to the single-chip package and input/output interconnects. We focus on optical fiber-coupling structures comparing edge and surface couplers. In the following, we detail optical alignment tolerances for both coupling architecture, discussing advantages and drawbacks from the packaging process point of view. Finally, we describe some achievements involving advanced-packaging techniques.
机译:硅光子学是一项新技术,至少应使电子器件和光学器件集成在同一光电电路芯片上,从而通过使用微电子行业的标准工艺在硅片上生产低成本器件。为了实现真正的低成本器件,需要应对光学与电子器件的集成技术过程以及芯片封装方面的一些挑战。在本文中,我们回顾了从CMOS晶圆级集成到单芯片封装以及输入/输出互连的硅光子电路封装的最新进展。我们专注于比较边缘和表面耦合器的光纤耦合结构。接下来,我们将详细介绍两种耦合结构的光学对准公差,并从封装工艺的角度讨论优点和缺点。最后,我们描述了一些涉及高级包装技术的成就。

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