Temperature Characteristics of the Substrate for Lamb Wave Type Elastic Wave Devices

摘要

Plate wave (Lamb wave) propagation in an extremely thin quartz substrate is analyzed. A cut angle is sought that exhibits an ultrastable temperature dependence of the frequency characteristics so that the frequency changes little with temperature. Highly stable temperature characteristics of the frequency indicating second- and third-order curves are obtained. Theoretical and experimental investigations of the temperature characteristics of the frequency of Lamb waves propagating in an AT-cut quartz substrate indicate excellent agreement between the two, confirming that the reliability of the results of the present analysis is high.