Eco-Friendly Fully Water-Driven Metal–Oxide Thin Films and Their Applications in Transistors and Logic Circuits

Chong Zhang; Gang He; Bing Yang; Yufeng Xia; Yongchun Zhang

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Eco-Friendly Fully Water-Driven Metal–Oxide Thin Films and Their Applications in Transistors and Logic Circuits

机译：生态友好型全水驱动金属氧化物薄膜及其在晶体管和逻辑电路中的应用

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In this paper, a nontoxic and environmentally friendly water-driven (WD) route to prepare InZnO thin films with various molar ratio of In and Zn has been reported. The formation mechanisms and physical properties of InZnO thin films as a function of eleme

机译：在本文中，已经报道了一种无毒且环保的水驱动（WD）路线，以制备具有不同摩尔比的In和Zn的InZnO薄膜。 InZnO薄膜的形成机理和物理性质随电子元件的变化

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来源
《IEEE Transactions on Electron Devices》 |2019年第9期|3847-3853|共7页
作者
Chong Zhang; Gang He; Bing Yang; Yufeng Xia; Yongchun Zhang;
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作者单位

School of Physics and Materials Science Anhui University Hefei China;

School of Physics and Materials Science;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
Thin film transistors; Hafnium oxide; Logic gates; Zinc; Performance evaluation; Thermal stability; Solvents;

机译：薄膜晶体管;氧化f逻辑门锌;绩效评估;热稳定性;溶剂类;

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专利

1. Eco-Friendly Fully Water-Driven HfGdO _x Gate Dielectrics and Its Application in Thin-Film Transistors and Logic Circuits [J] . Zhang Chong, He Gang, Fang Zebo, IEEE Transactions on Electron Devices . 2020,第3期

机译：环保全水驱动HFGDO _X栅极电介质及其在薄膜晶体管和逻辑电路中的应用
2. Low-voltage gallium-indium-zinc-oxide thin film transistors based logic circuits on thin plastic foil: Building blocks for radio frequency identification application [J] . A. K. Tripathi, E. C. P Smits, J. B. P. H. van der Putten, Applied Physics Letters . 2011,第16期

机译：基于薄塑料箔上的逻辑电路的低压镓铟锌氧化物薄膜晶体管：射频识别应用的构建块
3. Air-stable conversion of separated carbon nanotube thin-film transistors from p-type to n-type using atomic layer deposition of high-κ oxide and its application in CMOS logic circuits [J] . Zhang J., Wang C., Fu Y., ACS nano . 2011,第4期

机译：高k氧化物原子层沉积将分离的碳纳米管薄膜晶体管从p型到n型的空气稳定转变及其在CMOS逻辑电路中的应用
4. Bendable Metal Oxide Thin-Film Transistors and Circuits for Analog Electronics Applications [C] . Luisa Petti, Giuseppe Cantarella, Julio C. Costa, Conference on Oxide-based Materials and Devices . 2021

机译：可弯曲的金属氧化物薄膜晶体管和用于模拟电子产品的电路
5. Design, deposition, and characterization of novel transparent oxide thin films for applications in organic photovoltaics and thin film transistors. [D] . Liu, Jun. 2010

机译：设计，沉积和表征用于有机光伏和薄膜晶体管的新型透明氧化物薄膜。
6. Logic circuits composed of flexible carbon nanotube thin-film transistor and ultra-thin polymer gate dielectric [O] . Dongil Lee, Jinsu Yoon, Juhee Lee, -1

机译：由柔性碳纳米管薄膜晶体管和超薄聚合物栅极电介质组成的逻辑电路
7. Low-voltage gallium-indium-zinc-oxide thin film transistors based logic circuits on thin plastic foil: Building blocks for radio frequency identification application (vol 98, 162102, 2011) [O] . Tripathi, A. K, Smits, E. C. P, van der Putten, J. B. P. H, 2011

机译：基于薄塑料箔上的逻辑电路的低压镓铟锌氧化物薄膜晶体管：射频识别应用的构建块（第98卷，162102卷，2011年）

Eco-Friendly Fully Water-Driven Metal–Oxide Thin Films and Their Applications in Transistors and Logic Circuits

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