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Adjustment of Shielding Effectiveness, Optical Transmission, and Sheet Resistance of Conducting Films Deposited on Glass Substrates

机译:调整沉积在玻璃基板上的导电膜的屏蔽效果,光透射率和薄层电阻

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摘要

This paper addresses the combined theoretical assessment of shielding effectiveness, optical transmission, and sheet resistance of conductors in a thin-film technology. The synthesized model is based on the well-known transmission line approach to describe the wave propagation through multilayer structures consisting in thin films deposited on dielectric substrates. In this study, a complete model synthesis is presented, combining the estimation of the above parameters simultaneously. This model includes corrections of a few errors and inaccuracies regarding the computation of thin-film impedances, thereby clarifying the current literature survey. Additionally achieving the best tradeoff between shielding effectiveness and optical transmission is facilitated with the proposed model. Experimental results from continuous and mesh conducting films deposited on glass substrates have been compared with the theoretical ones, thereby validating the present model.
机译:本文讨论了在薄膜技术中屏蔽效果,光传输和导体的薄层电阻的综合理论评估。合成模型基于众所周知的传输线方法来描述通过多层结构的波传播,该多层结构由沉积在电介质基板上的薄膜组成。在这项研究中,提出了一个完整的模型综合,同时结合了上述参数的估计。该模型包括一些关于薄膜阻抗计算的误差和不正确性的校正,从而澄清了当前的文献调查。此外,该模型还有助于在屏蔽效率和光传输之间实现最佳折衷。将沉积在玻璃基板上的连续导电膜和网状导电膜的实验结果与理论值进行了比较,从而验证了该模型。

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