Fast thermo-pneumatic actuation of a thin PDMS membrane using a micro Peltier-element for microfluidic applications

摘要

In this paper we present a concept for fast thermo-pneumatic actuation of a thin flexible PDMS membrane using a micro Peltier-element for controlling the temperature of the working fluid in a piston-like liquid reservoir. By adjusting the temperature of the working fluid, in our case ethanol, the volumetric thermal expansion is controlled, which is in turn directly coupled to membrane deflection. Pinch-off and subsequent release of a microfluidic channel above the membrane is achieved in a few seconds. The proposed setup can be potentially utilized for the realization of fast and robust microfluidic valves and pumps.