Adaptive Automated Control Systems for Growing Single Crystals by the Methods of Czochralski, Stepanov (EFG) and Kyropoulos Using a Weight Sensor

摘要

This work summarizes the results of the creation of adaptive control systems for growing single crystals of oxides and sapphire by the methods of Czochralski, Stepanov (EFG) and Kyropoulos using weight sensors. The developed adaptive automated control systems for these growing methods are used on crystal growth unis produced by the Federal State Unitary Enterprise Experimental Factory of Scientific Engineering with the Special Design Bureau of the Russian Academy of Sciences for industrial application and research.