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Facilitating TiB2 for Filtered Vacuum Cathodic Arc Evaporation

机译:促进TIB2用于过滤真空阴极电弧蒸发

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TiB2 is well established as a superhard coating with a high melting point and a low coefficient of friction. The brittle nature of borides means they cannot be utilised with arc evaporation, which is commonly used for the synthesis of hard coatings as it provides a high deposition rate, fully ionised plasma and good adhesion. In this work, TiB2 conical cathodes with non-standard sintering additives (carbon and TiSi2) were produced, and the properties of the base material, such as grain structure, hardness, electrical resistivity and composition, were compared to those of monolithic TiB2. The dependence of the produced cathodes’ electrical resistivity on temperature was evaluated in a furnace with an argon atmosphere. Their arc–evaporation suitability was assessed in terms of arc mobility and stability by visual inspection and by measurements of plasma electrical potential. In addition, shaping the cathode into a cone allowed investigation of the influence of an axial magnetic field on the arc spot. The produced cathodes have a bulk hardness of 23–24 GPa. It has been found that adding 1 wt% of C ensured exceptional arc-spot stability and mobility, and requires lower arc current compared to monolithic TiB2. However, poor cathode utilization has been achieved due to the steady generation of cathode flakes. The TiB2 cathode containing 5 wt% of TiSi2 provided the best balance between arc-spot behaviour and cathode utilisation. Preventing cathode overheating has been identified as a main factor to allow high deposition rate (±1.2 μm/h) from TiB2-C and TiB2-TiSi2 cathodes.
机译:TIB2作为具有高熔点和低摩擦系数的超硬涂层。硼化物的脆性性意味着它们不能与弧蒸发一起使用,这通常用于合成硬涂层,因为它提供高沉积速率,完全电离等离子体和良好的粘附性。在这项工作中,产生具有非标准烧结添加剂(碳和TISI2)的TIB2锥体阴极,并将基材的性质与整体TIB2的那些进行比较,例如晶粒结构,硬度,电阻率和组成。在具有氩气氛的炉中评价产生的阴极电阻率对温度的依赖性。通过目视检测和通过测量等离子体电位来评估它们的电弧蒸发适用性。另外,将阴极塑造成锥体允许研究轴向磁场对弧斑的影响。产生的阴极具有23-24GPa的块状硬度。已经发现,添加1wt%的C确保了出色的弧度稳定性和移动性,并且与单片TIB2相比需要较低的电流。然而,由于阴极薄片的稳定产生,已经实现了差的阴极利用。含有5wt%TISI2的TIB2阴极提供了弧度行为和阴极利用之间的最佳平衡。预防阴极过热已被鉴定为允许来自TIB2-C和TIB2-TIBO 2阴极的高沉积速率(±1.2μm/ h)的主要因素。

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