Oxide layers on titanium foils were produced by galvanostatically controlled plasma electrolytic oxidation in 12.9 M sulfuric acid with small amounts of phosphoric acid added up to a 3% mole fraction. In pure sulfuric acid, the oxide layer is distinctly modified by plasma discharges. As the time of the process increases, rough surfaces with typical circular pores evolve. The predominant crystal phase of the titanium dioxide material is rutile. With the addition of phosphoric acid, discharge effects become less pronounced, and the predominant crystal phase changes to anatase. Furthermore, the oxide layer thickness and mass gain both increase. Already small amounts of phosphoric acid induce these effects. Our findings suggest that anions of phosphoric acid preferentially adsorb to the anodic area and suppress plasma discharges, and conventional anodization is promoted. The process was systematically investigated at different stages, and voltage and oxide formation efficiency were determined. Oxide surfaces and their cross-sections were studied by scanning electron microscopy and energy-dispersive X-ray spectroscopy. The phase composition was determined by X-ray diffraction and confocal Raman microscopy.
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