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Electromechanical Characteristic Analysis of Passive Matrix Addressing for Grating Light Modulator

机译:光栅光调制器无源矩阵寻址的机电特性分析

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A Grating Light Modulator (GLM) based on Micro-Electro-Mechanical Systems (MEMS) is applied in projection display. The operating principle of the GLM is introduced in this paper. The electromechanical characteristic of the passive matrix addressing GLM is studied. It was found that if the spring constant is larger, both the response frequency and the driving voltage are larger. Theoretical analysis shows that the operating voltage and the pull-in voltage of the GLM are 8.16 and 8.74 V, respectively. When an all-selected pixel in a m×n array is actuated by a voltage V0, the voltages of the half-selected pixel in row and column are V0(m–1)/(m+n–1) and V0(n–1)/(m+n–1), respectively, and the voltage of the non-selected pixel is V0/(m+n–1). Finally, the experimental results indicate that the operating voltage and the pull-in voltage are 7.8 and 8.5V respectively, and the response frequency of the GLM is about 7 kHz. The crosstalk in a 16×16 GLM array is validated by the experiment. These studies provide a theoretical basis for improving the GLM driver.
机译:基于微机电系统(MEMS)的光栅光调制器(GLM)被应用于投影显示。本文介绍了GLM的工作原理。研究了无源矩阵寻址GLM的机电特性。已经发现,如果弹簧常数较大,则响应频率和驱动电压都较大。理论分析表明,GLM的工作电压和吸合电压分别为8.16 V和8.74V。当通过电压V 0 激活am×n阵列中的全选像素时,行和列中半选像素的电压为V 0 (m –1)/(m + n-1)和V 0 (n-1)/(m + n-1),未选择像素的电压为V 0 /(m + n–1)。最后,实验结果表明,工作电压和吸合电压分别为7.8V和8.5V,GLM的响应频率约为7 kHz。实验验证了16×16 GLM阵列中的串扰。这些研究为改进GLM驱动程序提供了理论基础。

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