Improvement of Cut Quality in Rapid-Cutting of Glass Method via Femtosecond Laser Filamentation

摘要

Microfabrication of transparent materials using femtosecond laser pulses has showed good po-tential towards industrial application. Maintaining pulse energies above the critical self-focusing limit produced filaments that were used for micromachining purposes. This article demonstrates a fabrication technique using femtosecond filaments generated in water which is in contact with the transparent sample, in addition, given a slight modification to this setup, the quality of the micro processed samples can be increased dramatically. These fabricated holes have a tapper angle close to zero; moreover, the fabrication time is of the order of tens of seconds.