Modeling Effects of Three Nano-scale Physical Phenomena on Instability Voltage of Multi-layer MEMS/NEMS: Material Size Dependency, van der Waals Force and Non-classic Support Conditions

摘要

Although many microano-electromechanical systems (MEMS/NEMS) are implemented by multi-layer components, only few researchers have modeled the instability of these multi-layer structures. Herein, the electrostatic instability of multi-layer MEMS/NEMS is