Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

摘要

Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of Ca€“C energy transfer circuit and thyratron is used as a high-voltage main switch with singlestage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Nia€“Zn ferrite cores. The laser can generate about 150 mJ at a??100 Hz rep-rate reliably from a discharge volumeof 100 cm$^3$. 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.