Investigation of the he content within W coatings by using glow discharge optical emission spectrometry

摘要

GDOES (Glow Discharge Optical Emission Spectrometry) technique is able to perform depth profile analysis by measuring the intensities of the emission of the excited atomic species removed from the surface of the investigated samples. W coated samples with He content deposited by CMSII (Combined Magnetron Sputtering and Ion Implantation) were used for GDOES measurements. The morphology of the coatings has been investigated by SEM analysis whereas the He content within the layer has been evidenced by TDS (Thermal Desorption Spectroscopy) measurements. The qualitative elemental depth profile across the coating has been measured by GDOES.