Proposal of Scanning Probe Microscope with MEMS Cantilever for Study of Conductive and Non-conductive Materials

摘要

We have developed a new three-terminal micro-electro-mechanical systems (MEMS) device for scanning probe microscopy. The MEMS-probe comprises a metal cantilever and two electrodes. One electrode is used for adjustment of the gap between the cantilever and another for measuring the tunnelling current. The probe is working in oscillatory regime at resonant frequency. Three feedback mechanisms are used to measure the surface topography. The feedback control is performed fully within the MEMS-probe and the piezo-element is used only for lateral scanning over the surface. In the oscillatory mode the MEMS-probe enables spectroscopic measurements at a high frequency.