Surface Topography Investigations of TiN Layers on Different Substrates

摘要

We have performed the studies of the surface topography of TiN layers deposited on steel and silicon substrates. TiN coatings have been prepared by the arc physical vapor deposition (PVD) technique. As the final useful mechanical properties of protective coatings are strongly determined by the state of the surface, we have carried out the complex optical, atomic force microscopy (AFM), and scanning electron microscopy (SEM) investigations. The optical studies include XY optical profilometer measurements and bidirectional reflection distribution function (BRDF) measurements, being complementary to AFM and SEM methods. From the power spectral density (PSD) function obtained from the optical data, the root-mean square (rms) roughness and correlation length have been determined. This has allowed one to estimate correlation between roughness of surface before and after deposition and to measure the surface parameters.