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Ink transport modelling in Dip-Pen Nanolithography and Polymer Pen Lithography

机译:浸笔纳米光刻和聚合物笔光刻中的油墨传输建模

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Dip-pen nanolithography (DPN) and Polymer pen lithography (PPL) are powerful lithography techniques being able to pattern a wide range of inks. Transport and surface spreading depend on the ink physicochemical properties, defining its diffusive and fluid character. Structure assembly on surface arises from a balance between the entanglement of the ink itself and the interaction with the substrate. According to the transport characteristics, different models have been proposed. In this article we review the common types of inks employed for patterning, the particular physicochemical characteristics that make them flow following different dynamics as well as the corresponding transport mechanisms and models that describe them.
机译:浸笔式纳米光刻(DPN)和聚合物笔光刻(PPL)是强大的光刻技术,能够对各种油墨进行图案化。传输和表面扩散取决于墨水的物理化学性质,从而定义其扩散和流体特性。表面上的结构组装是由油墨本身的缠结和与基材的相互作用之间的平衡引起的。根据运输特性,提出了不同的模型。在本文中,我们回顾了用于图案形成的常见墨水类型,使它们遵循不同动力学而流动的特殊物理化学特性,以及描述它们的相应传输机制和模型。

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