Influence of Diffusion Parameters on Electrical Characteristics of mc-Si Solar Cells with Aluminum and Phosphorus Diffusion Performed in the Same Thermal Step

摘要

The diffusion of phosphorus and aluminum in a single-step thermal process may reduce the production cost of multicrystalline silicon (mc-Si) solar cells. The goal of this paper is to analyze the influence of phosphorus diffusion parameters on the electrical characteristics of p-type mc-Si solar cells processed with a single-step diffusion of phosphorus and aluminum. To avoid the wafer bowing during aluminum paste firing, the aluminum was deposited by e-beam and co-diffused in the same thermal step that the phosphorus diffusion. First, the aluminum diffusion was performed and, then, the POCl 3 was introduced into the quartz tube. The steps of the phosphorus diffusion were experimentally optimized. The best result was found with the temperature of 875 oC. The POCl 3 concentration of 0.15 % and the optimized phosphorus diffusion parameters lead to the efficiency of 14.1%. The reduction of the oxygen flow during ramp temperature and aluminum diffusion improved the efficiency.