We present the development of a microfluidic AFM (atomic force microscope) cantilever-based platform to enable the local dispensing and aspiration of liquid with volumes in the pico-to-femtoliter range. The platform consists of a basic AFM measurement system, microfluidic AFM chip, fluidic interface, automated substrate alignment, external pressure control system and controlled climate near the dispensing area. The microfluidic AFM chip has a hollow silicon dioxide (SiO~(2)) cantilever connected to an on-chip fluid reservoir at one end and a slicon nitride (Si~(3)N~(4)) tip with an aperture on the other end. A 3D printed plastic fluidic interface glued over the on-chip reservoir was used to connect microfluidics and macrofluidics. The fluidics is connected to an external pressure control system ranging from ?0.8?bar to 5?bar with 0.1?bar resolution. This pressure range allows dispensing and aspiration of liquids through the cantilever tip aperture. The controlled climate with a temperature control range between 25°C – 40°C and humidity up to 95% near the dispensing area keeps the droplets for sufficiently long time before they evaporate. An array of droplets can be programmed to be dispensed automatically and access them again with a position accuracy of 1 micron. Experiments were performed with two types of cantilevers with different geometrical configurations. A minimum flow rate control of 50?fL/s was obtained and also frequency shift was monitored as the cantilever was filled with liquid. This platform will be used for various chemical and biological applications.
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