Investigating Characteristics of the Static Tri-Switches Tactile Probing Structure for Micro-Coordinate Measuring Machine (CMM)

摘要

This paper describes the fabrication of a series of micro ball-ended stylus tips by applying micro-EDM (Electrical Discharge Machining) and OPED (One Pulse Electrical Discharge) processes, followed by a manual assembly process of a static tri-switches tactile structure on a micro-CMM (Coordinate Measuring Machine). This paper further proves that the essential performance of the proposed system meets an acceptable benchmark among peer micro-CMM systems with a low cost. The system also adjusts for ambient temperature and humidity as the ordinary lab environmental conditions. For demonstration, several experiments used a randomly selected glass stylus with the diameters of stem and sphere of 0.07 mm and 0.12 mm, respectively. By leveraging research guidelines and common practice, this paper further investigates the probing relationship between measurement accuracy and its associated critical characteristics, namely triggering scenarios and geometric feature probing validation. The experimental results show that repeated detections in the uncertainty, in vertical and horizontal directions of the same point, achieved as small as 0.11 μm and 0.29 μm, respectively. This customized tri-switches tactile probing structure was also capable of measuring geometric features of micro-components, such as the inner profile and depth of a micro-hole. Finally, extensions of the proposed approach to pursue higher accuracy measurement are discussed.