A Novel Method for Evaluation of Band Width of MEMS-Based Embedded Gas Sensor

摘要

This paper represents a novel method of evaluation of band width of MEMS based embedded gas sensor by using the concept of adding white Noise. In this paper we are providing the details of MEMS based embedded gas sensor and adding a concept to evaluate narrowed bandwidth of MEMS based gas sensor. Novel technique includes the concept of amplitude demodulation and temperature modulation. The gas sensor virtual component encloses the sensor and its associated analog circuitry into a digital shell so that all interface connections to the virtual component are digital. The system architecture supports an array of gas sensor elements. System response time is limited by the sensor and is complex. Example gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole. In the present scenario all the sensors output is communicated through computer system so evaluation of Centre frequency and bandwidth is important. Bandwidth of MEMS based gas sensor is measured and compared with help of spectral analysis.