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Imprint patterning: a novel method for producing high density interconnects

机译:压印图案:一种用于生产高密度互连的新颖方法

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摘要

Imprint patterning is a new circuit formation process that is based on a well-established technology called microreplication. Microreplication has been used for many years for making a diverse range of products such as compact discs (CDs), roadside reflective signs and even holographic wrapping paper. As is the case with printed circuit boards microreplication is typically practised where the surface features are very small in relation to the length and width of the product. This paper reports details of a new and potentially disruptive technology that draws on a well- established imprinting process to provide a comparatively low cost and shorter route to the fabrication of high density interconnections and microvias.
机译:压印图案化是一种新的电路形成过程,其基于一种称为微复制的成熟技术。微型复制技术已经用于生产多种产品,例如光盘(CD),路边的反光标志甚至全息包装纸。与印刷电路板一样,通常在表面特征相对于产品的长度和宽度很小的情况下进行微复制。本文详细介绍了一种新的,具有潜在破坏性的技术,该技术利用成熟的压印工艺为制造高密度互连和微孔提供了相对较低的成本和较短的途径。

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