Novel method for making microoptics elements with continuous relief

摘要

We introduce the moving-mask method for fabrication of microoptics ele- ments (MOE) with continuous relief in this paper. With only one mask engaged, we ob- tained a continuous relief with line-symmetry of rotation-symmetry several kinds of MOE have been made by using this method such as blazed grating, parabolic grating, cylindri- cal lens, et al., experimental results are given.