Deep-UV nonlinear optical crystal KBe_2BO_3F_2-discovery, growth, optical properties and applications

摘要

This review introduces in detail the history of the discovery of the nonlinear optical crystal KBe_2BO_3F_2 (KBBF), with a full description of its growth, space structure, optical properties, and capability to generate deep-ultraviolet (UV) harmonic generation. Several important applications developed recently using all-solid-state deep-UV light sources, such as super-high-resolution laser photoemis-sion spectrograph and 193 nm photolithography, will be reviewed.