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首页> 外文期刊>Applied Physics Letters >Shape precompensation in two-photon laser nanowriting of photonic lattices
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Shape precompensation in two-photon laser nanowriting of photonic lattices

机译:光子晶格的双光子激光纳米写入中的形状预补偿

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摘要

We first analyze why most of the photonic crystals produced by two-photon photopolymerization technique exhibit no photonic band gap effect. And then subdiffraction-limited resolution-enabled finely quantified pixel writing, a scheme that has been used in micromachine fabrication, is adopted as the solution. As a result, higher accuracy in depicting and better reproducibility in both fabrication and photonic band gap effect observation are obtained. More important, the method allows for precise precompensation of the structure shrinkage induced by photochemical reactions of polymerization, which may pave the way to high-fidelity fabrication of polymer photonic and optoelectronic devices that require strictly the structural parameters. (C) 2004 American Institute of Physics.
机译:我们首先分析为什么通过双光子光聚合技术产生的大多数光子晶体都没有光子带隙效应。然后采用已在微机制造中使用的方案的亚衍射极限分辨率使能的精细量化像素写入作为解决方案。结果,在制造和光子带隙效应观察中都获得了更高的描绘精度和更好的再现性。更重要的是,该方法可以对由聚合反应的光化学反应引起的结构收缩进行精确的预补偿,这可以为严格要求结构参数的聚合物光子和光电器件的高保真度制造铺平道路。 (C)2004美国物理研究所。

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