2.45 GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology

摘要

A plasma system based on microstrip technology was developed for the generation of atmospheric pressure microplasmas. A discharge gap was placed between the striplines and the ground plane on the transverse cross section in the direction of microwave propagation. This microstrip structure permits the concentration of electric fields at the discharge gap, which is confirmed by a computer simulation using the three-dimensional simulation code based on the finite-difference time-domain method, and can produce atmospheric pressure plasmas even in air. The microplasmas were sustained in the discharge gap (width: 0.2 mm, length: 6 mm) at a microwave power of 1 W. The experimentally measured rotational temperature of nitrogen molecules was 800 K, indicating these plasmas to be nonthermal plasmas. This plasma system will provide a portable microplasma system utilizing a small semiconductor microwave source and a large-scale atmospheric pressure nonthermal plasma using the array configuration.